Choose from a suite of detector options. Enter the world of high-end imaging: Sigma 300 delivers excellence in price and performance while Sigma 500’s best-in-class EDS geometry offers superb analytical performance.
Sigma Family – Field Emission Scanning Electronic Microscope (FE-SEM)
FE-SEM for High-Quality Imaging & Advanced Analytical Microscopy
The ZEISS Sigma family combines field emission scanning electronic microscope (FE-SEM) technology with an excellent user experience. Structure your imaging and analysis routines and increase productivity.
| ZEISS Sigma 300 | ZEISS Sigma 500 | ||
| Electron Source | Schottky Thermal Field Emitter | Schottky Thermal Field Emitter | |
| Resolution* at 30 kV (STEM) | 1.0 nm | 0.8 nm | |
| Resolution* at 15 kV | 1.0 nm | 0.8 nm | |
| Resolution* at 1 kV | 1.6 nm | 1.3 nm | |
| Resolution* at 30 kV (VP Mode) | 2.0 nm | 1.5 nm | |
| Backscatter Detector (BSD) | aBSD / HDBSD | aBSD / HDBSD | |
| Maximum Scan Speed | 50 ns/pixel | 50 ns/pixel | |
| Accelerating Voltage | 0.02 – 30 kV | 0.02 – 30 kV | |
| Magnification | 10× – 1,000,000× | 10× – 1,000,000× | |
| Probe Current | 3 pA – 20 nA (100 nA optional) | 3 pA – 20 nA (100 nA optional) | |
| Image Framestore | 32 k × 24 k pixels | 32 k × 24 k pixels | |
| Ports | 10 | 14 | |
| EDS Ports | 2 (1 dedicated port) | 3 (2 dedicated ports) | |
| *optimum working distance; upon final installation, the resolution is proven in the systems acceptance test at 1 kV and 15 kV in high vacuum | |||
| Vacuum Modes | |||
| High Vacuum | Yes | Yes | |
| Variable Pressure | 10-133 Pa | 10 – 133 Pa | |
| Stage Type | 5 axis compucentric stage | 5 axis eucentric stage | 5 axis compucentric stage option |
| Stage travel X | 125 mm | 130 mm | 125 mm |
| Stage travel Y | 125 mm | 130 mm | 125 mm |
| Stage travel Z | 50 mm | 50 mm | 38 mm |
| Stage travel T | -10 to +90 degrees | -4 to +70 degrees | -10 to +90 degrees |
| Stage travel R | 360° Continuous | 360° Continuous | 360° Continuous |
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